XLA external appearance (side)
Model | XLA-16 | XLA (V)-25 | XLA-40 | XLA-50 | XLA-63 | XLA-80 | |
---|---|---|---|---|---|---|---|
Valve Type | Normally closed (pressurize to open, spring seal) | ||||||
Fluids | Inert gas under vacuum | ||||||
Operating Temperature (°C) | XLA | 5 to 60 (5 to 150 for high temperature type) | |||||
Operating Pressure Pa (abs) | 1 × 10-6 to atmospheric pressure | ||||||
Conductance L/s Note 1: | 5 | 14 | 45 | 80 | 160 | 200 | |
Leakage Pa·m3/s | Internal | For standard material (FKM): 1.3 × 10-10, values at normal temperature and excluding gas permeation | |||||
External | For standard material (FKM): 1.3 × 10-11, values at normal temperature and excluding gas permeation | ||||||
Flange Type | KF (NW) | KF (NW) / K (DN) | |||||
Principal Material | Main body: aluminum alloy, Bellows: Stainless steel 316L, Main parts: Stainless steel, FKM (standard sealing material) | ||||||
Surface Treatment | External: hard anodized aluminum, Internal: raw material | ||||||
Pilot Pressure MPa (G) | 0.4 to 0.7 | ||||||
Pilot Port Size | XLA | M5 | Rc 1/8 | ||||
Weight (kg) | XLA | 0.25 | 0.45 | 1.1 | 1.6 | 2.9 | 5.0 |
Note 1: Conductance is the same as that of an elbow with the same dimensions.
With solenoid valve
Valve side exhaust
By applying pressure from the pilot port, the valve linked to the piston overcomes the spring force and actuating force and opens.
XLAV normally applies pilot pressure to the 1 (P) port. The valve opens when the solenoid valve is on and closes when it is off.
XLA air-operated type dimensional drawing
Note: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for more details.
(Unit: mm)
Model | A | B | C | D | E Note 1: | Fn | Fd | G | H |
---|---|---|---|---|---|---|---|---|---|
XLA-16 | 40 | 103 | 38 | 1 | - | 30 | - | 17 | 40 |
XLA-25 | 50 | 113 | 48 | 1 | 12 | 40 | - | 26 | 39 |
XLA-40 | 65 | 158 | 66 | 2 | 11 | 55 | - | 41 | 63 |
XLA-50 | 70 | 170 | 79 | 2 | 11 | 75 | - | 52 | 68 |
XLA-63 | 88 | 196 | 100 | 3 | 11 | 87 | 95 | 70 | 69 |
XLA-80 | 90 | 235 | 117 | 3 | 11 | 114 | 110 | 83 | 96 |
Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Vacuum regulator with low outgassing.
[Features]
· Aluminum body.
· Replaceable bellows.
· Uniform baking temperature.
· Lightweight and compact.
· Little heavy metal contamination.