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Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

Cod piesă:

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Informații despre produs

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications

Angle valve XMD Series external appearance

Angle valve XMD Series external appearance

Angle valve XMD series pilot port direction

Angle valve XMD series pilot port direction

In-line type XYD series external appearance

In-line type XYD series external appearance

In-line type XYD series pilot port direction

In-line type XYD series pilot port direction

ModelXMD-25
XYD-25
XMD-40
XYD-40
XMD-50
XYD-50
XMD-63
XYD-63
XMD-80
XYD-80
Flange (Valve) Size2540, CF0705063, CF11480
Valve TypeNormally closed (pressurize to open and spring seal) (both main and initial exhaust valves)
FluidsInert gas under vacuum
Operating Temperature (°C)5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)1 × 10-6 up to atmospheric pressure
Conductance L/s Note 1Main Exhaust Valve144580160200
Initial Exhaust Valve0.5 to 32 to 82.5 to 114 to 184 to 18
Leakage Pa·m3/sInternalFor standard material (FKM): 1.3 × 10-10, values at ambient temperature and excluding gas permeation
ExternalFor standard material (FKM): 1.3 × 10-11, values at ambient temperature and excluding gas permeation
Operating Time (s)Main Exhaust Valve0.100.210.240.260.28
Initial Exhaust Valve0.700.080.090.230.27
Flange TypeKF (NW)KF (NW), CFKF (NW)KF (NW), K (DN), CFKF (NW), K (DN)
Principal Material Note 3Main body: SCS13 (Stainless steel 304 equivalent), Bellows: Stainless steel 316L,
Bellows holder: Stainless steel 304, FKM (standard seal material)
Pilot Pressure MPa (G)0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port SizeM5Rc 1/8 
Weight kg Note 2XMD0.651.50 (1.86)2.204.10 (5.46)6.80
XYD0.711.522.604.808.30

Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

 

(Unit: mm)

 

XMD angle type dimensional drawing

XMD angle type dimensional drawing

XYD in-line type dimensional drawing

XYD in-line type dimensional drawing

ModelABCDFnFdFcGHJKP.C.D. L1L2
XMD-255012348140--2641167.5--
XMD-406517066255-7041632015P.C.D 58.76 × ø6.6 mm
XMD-507018379275--52682017.5--
XMD-63882171003879511470722019.5P.C.D 92.18 × ø8.4 mm
XMD-80902561173114110-83982026.5--
ModelABCDEFnFdGHJK
XYD-25100.286.748123.540-2666167.5
XYD-401301146623855-41842015
XYD-501781287925375-52952017.5
XYD-632091631003618795701212019.5
XYD-80268193117380114110831442026.5

Product Diagram

XMD angle type diagram

XMD angle type diagram

XYD in-line type diagram

XYD in-line type diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Product Working Principle

  • 1. Initial exhaust valve opening adjustment
    Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. See figure to the right for the relationship between the number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance.
  • 2. Opening of the initial exhaust valve (valve S)
    When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
  • 3. Opening of the main exhaust valve (valve M)
    When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
  • 4. Closing of the initial and main exhaust valves
    Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.
Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Notes

  • *The body material is SCS13 (Stainless steel 304 equivalent), the bellows material is Stainless steel 316L and the metal material used for other vacuum parts is Stainless steel 304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part must be no higher than 60°C.
  • *Refer to the manufacturer's catalog for product information not detailed above.

Lista codurilor de piese

Număr de articole

Flange Type

Flange Calls

Sonic Conductance

Valve Type

Pilot Port Direction

Temperature Range

(°C)

Switch Part Number

Number of Switches

Seal material

Amount of leakage

(Pa·m3/s)

Seal Change Location

Length of Lead Wire for Switch

(m)

Cantitate minimă per comandă
KF
25
14L/S
Angle type
Flange side
5 to 60
No auto-switch (no built-in magnet)
No switch
EPDM 2101-80
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
40
45L/S
Angle type
Flange side
5 to 60
No auto-switch (no built-in magnet)
No switch
EPDM 2101-80
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
40
45L/S
Angle type
Flange side
5 to 60
No auto-switch (no built-in magnet)
No switch
Chemraz SS592
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
CF
40
45L/S
Angle type
Flange surface, back
5 to 60
D-A93 reed auto switch
2 pcs. valve open/closed
VMQ 1232-70
Internal: 1.3 × 10-8, External: 1.3 × 10-11
Valve seal / S valve seal assembly / O-ring for fixing
3
1 bucăți
KF
40
45L/S
Angle type
Flange side
5 to 150
No auto-switch (no built-in magnet)
No switch
EPDM 2101-80
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
40
45L/S
Angle type
Flange surface, back
5 to 60
No auto-switch (with built-in magnet)
No switch
Kalrez 4079
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
40
45L/S
Angle type
Flange surface, right
5 to 60
No auto-switch (no built-in magnet)
No switch
Kalrez 4079
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
50
80L/S
Angle type
Flange side
5 to 60
No auto-switch (no built-in magnet)
No switch
EPDM 2101-80
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
50
80L/S
Angle type
Flange side
5 to 150
No auto-switch (no built-in magnet)
No switch
EPDM 2101-80
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
50
80L/S
Angle type
Flange side
5 to 150
No auto-switch (no built-in magnet)
No switch
Chemraz SS592
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
50
80L/S
Angle type
Flange surface, back
5 to 150
No auto-switch (no built-in magnet)
No switch
Kalrez 4079
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
25
14L/S
In-line type
Flange surface, back
5 to 150
No auto-switch (no built-in magnet)
No switch
EPDM 2101-80
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
KF
50
80L/S
In-line type
Flange surface, back
5 to 150
No auto-switch (no built-in magnet)
No switch
EPDM 2101-80
Internal: 1.3 × 10-8, External: 1.3 × 10-9
Valve seal / external seal / S valve seal assembly / O-ring for fixing
-
1 bucăți
Preț unitar (fără TVA)(preț unitar cu TVA incluse)
Dată de expediere standard
931.04 €
( 1,107.94 € )
26 zile lucrătoare
1,311.81 €
( 1,561.05 € )
26 zile lucrătoare
2,006.16 €
( 2,387.33 € )
26 zile lucrătoare
1,432.69 €
( 1,704.90 € )
26 zile lucrătoare
1,327.61 €
( 1,579.86 € )
26 zile lucrătoare
1,614.27 €
( 1,920.98 € )
26 zile lucrătoare
1,639.34 €
( 1,950.81 € )
26 zile lucrătoare
1,522.30 €
( 1,811.54 € )
26 zile lucrătoare
1,542.81 €
( 1,835.94 € )
26 zile lucrătoare
2,495.83 €
( 2,970.04 € )
26 zile lucrătoare
2,000.46 €
( 2,380.55 € )
26 zile lucrătoare
819.61 €
( 975.34 € )
60 zile lucrătoare
1,303.53 €
( 1,551.20 € )
60 zile lucrătoare

Informații detaliate

Informații de bază

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

Atenție

  • Product images may be representative images only. Please refer to the manufacturer's catalog for shape details.