[Features]
· Reduced seizing and extending too quickly.
· Realizes a smooth operation even at 0.5 mm/s (1 mm/s at ø16 or less).
· Improved functionality (new structure equivalent to the standard models).
· Interchangeable (mounting compatibility) with standard products.
[10-/11-Series, Clean Series]
· Compatible with a clean environment.
· Prevents generation of dust in cleanrooms.