Electric Slider, EZS Series

The EZS Series is a compact, high stiffness, simple dust-proof electric slider.
Equipped with AlphaStep AZ Series and AR Series in the motor part. High response, low vibration, and movement without hunting, which are unique to stepper motors, are realized with an electric slider.
[Features]
・ High stiffness and low profile guide
・ Space saving by the folded motor
・ Simple dust-proof structure prevents foreign object from entering and suppresses dust generation
・ Cleanroom compatible

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Part Numbers

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Part Number
EZS3-D015-ARAK-1
EZS3-D025-ARAK-3
EZS3CL-E005-ARMK-3
EZS4-D005-ARMKD
EZS4-D025-ARAK-2
EZS4-D030-ARMKD-3
EZS4-D040-ARAKD
EZS4R-E015-ARMK
EZS6-E030-ARAKD-3
EZS6-E080-ARMKD-3
EZS6L-E040-ARMK-1
EZSM3CRD040AZAK
EZSM3D005AZAK
EZSM3D010AZAK
EZSM3D015AZAK
EZSM3D020AZAK
EZSM3D025AZAK
EZSM3D040AZAK
EZSM3D050AZAK
EZSM3D055AZAK
EZSM3D065AZAK
EZSM3D070AZAK
EZSM3E005AZAK
EZSM3E005AZMK
EZSM3E010AZAK
EZSM3E015AZMK
EZSM3E020AZMK
EZSM3E025AZAK
EZSM3E025AZMK
EZSM3E035AZAK
EZSM3E040AZAK
EZSM3E055AZMK
EZSM3E060AZAK
EZSM3E065AZAK
EZSM3LD010AZAK
EZSM3LD015AZAK
EZSM3LD025AZAK
EZSM3LD030AZAK
EZSM3LD060AZAK
EZSM3LE010AZAK
EZSM3LE015AZMK
EZSM3LE025AZAK
EZSM3RD015AZAK
EZSM3RD015AZMK
EZSM3RD020AZAK
EZSM3RD020AZMK
EZSM3RD025AZAK
EZSM3RD055AZAK
EZSM3RE005AZMK
EZSM3RE015AZMK
EZSM3RE020AZAK
EZSM3RE025AZAK
EZSM4CLD040AZAK
EZSM4CLE040AZMK
EZSM4CRD020AZMK
EZSM4CRD040AZAK
EZSM4CRE030AZAK
EZSM4CRE030AZMK
EZSM4D015AZAK
EZSM4D015AZMK

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Stroke (mm)	Max. Transportable Mass Range (Horizontal) (kg)	Max. Transportable Mass (Horizontal) (kg)	Max. Transportable Mass Range (Vertical) (kg)	Max. Transportable Mass (Vertical) (kg)	Input Power Supply	Table Width W1 (mm)	Electromagnetic Break	Max. Thrust Force Range (N)	Max. Thrust Force (N)	Cable	Table Length L1 (mm)	Maximum Velocity (mm/sec)	Motor Mounting Direction	Driver Type	Slider Size (mm)	On-Board Motor	Motor Part Shape	Suction Fitting Direction	Product Type
898.28 €	1	38 Days	150	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Standard 1 m	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AR Series	Single axis shaft	-	Actuator + driver set product
923.79 €	1	38 Days	250	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Standard 3 m	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AR Series	Single axis shaft	-	Actuator + driver set product
1,149.93 €	1	38 Days	50	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Standard 3 m	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AR Series	With electromagnetic brake	Suction fitting left direction	Actuator + driver set product
1,093.11 €	1	38 Days	50	10.1 to 20.0	15	-	-	24/48 V DC	-	Included	0 to 100	70	Not Included	72	600	Straight	Positioning function built-in type	Width 74 × Height 50	AR Series	With electromagnetic brake	-	Actuator + driver set product
961.62 €	1	38 Days	250	10.1 to 20.0	15	-	-	24/48 V DC	-	Not Included	0 to 100	70	Standard 2 m	72	600	Straight	Pulse Train Input Type	Width 74 × Height 50	AR Series	Single axis shaft	-	Actuator + driver set product
1,181.35 €	1	38 Days	300	10.1 to 20.0	15	-	-	24/48 V DC	-	Included	0 to 100	70	Standard 3 m	72	600	Straight	Positioning function built-in type	Width 74 × Height 50	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,009.78 €	1	38 Days	400	10.1 to 20.0	15	-	-	24/48 V DC	-	Not Included	0 to 100	70	Not Included	72	600	Straight	Positioning function built-in type	Width 74 × Height 50	AR Series	Single axis shaft	-	Actuator + driver set product
1,061.30 €	1	38 Days	150	20.1 to 50.0	-	10.1 to 20.0	12.5	24/48 V DC	-	Included	101 to 200	125	Not Included	72	300	Right reversed motor	Pulse Train Input Type	Width 74 × Height 50	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,263.05 €	1	38 Days	300	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Standard 3 m	108	300	Straight	Positioning function built-in type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
1,598.54 €	1	38 Days	800	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Standard 3 m	108	200	Straight	Positioning function built-in type	Width 74 × Height 66.5	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,437.86 €	1	38 Days	400	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	360	Standard 1 m	108	300	Left reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	With electromagnetic brake	-	Actuator + driver set product
832.35 €	1	18 Days	400	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	Suction fitting right direction	Individual actuator
644.09 €	1	18 Days	50	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
644.90 €	1	18 Days	100	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
668.62 €	1	18 Days	150	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
669.44 €	1	18 Days	200	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
693.03 €	1	18 Days	250	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
718.26 €	1	18 Days	400	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
742.80 €	1	18 Days	500	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
766.38 €	1	18 Days	550	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
790.92 €	1	18 Days	650	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	460	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
791.75 €	1	18 Days	700	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	400	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
644.09 €	1	18 Days	50	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
804.76 €	1	18 Days	50	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
644.90 €	1	18 Days	100	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
829.17 €	1	18 Days	150	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
830.00 €	1	18 Days	200	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
693.03 €	1	18 Days	250	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
853.71 €	1	18 Days	250	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
717.44 €	1	18 Days	350	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
718.26 €	1	18 Days	400	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
927.07 €	1	18 Days	550	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
767.21 €	1	18 Days	600	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	270	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
790.92 €	1	18 Days	650	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	220	Straight	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
644.90 €	1	18 Days	100	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
668.62 €	1	18 Days	150	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
693.03 €	1	18 Days	250	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
693.86 €	1	18 Days	300	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
767.21 €	1	18 Days	600	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	550	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
644.90 €	1	18 Days	100	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
829.17 €	1	18 Days	150	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
693.03 €	1	18 Days	250	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Left reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
668.62 €	1	18 Days	150	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
829.17 €	1	18 Days	150	5.1 to 10.0	7.5	2.1 to 5.0	3.5	24/48 V DC	54	Included	0 to 100	43	Not Included	72	600	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
669.44 €	1	18 Days	200	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
830.00 €	1	18 Days	200	5.1 to 10.0	7.5	2.1 to 5.0	3.5	24/48 V DC	54	Included	0 to 100	43	Not Included	72	600	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
693.03 €	1	18 Days	250	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
766.38 €	1	18 Days	550	5.1 to 10.0	7.5	-	-	24/48 V DC	54	Not Included	0 to 100	43	Not Included	72	600	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
804.76 €	1	18 Days	50	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
829.17 €	1	18 Days	150	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	54	Included	0 to 100	86	Not Included	72	300	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator
669.44 €	1	18 Days	200	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
693.03 €	1	18 Days	250	10.1 to 20.0	15	-	-	24/48 V DC	54	Not Included	0 to 100	86	Not Included	72	300	Right reversed motor	Pulse Train Input Type	Width 54 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
871.99 €	1	18 Days	400	10.1 to 20.0	15	-	-	24/48 V DC	-	Not Included	0 to 100	70	Not Included	72	600	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
1,032.68 €	1	18 Days	400	20.1 to 50.0	-	10.1 to 20.0	14	24/48 V DC	-	Included	101 to 200	125	Not Included	72	300	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	Suction fitting left direction	Individual actuator
982.03 €	1	18 Days	200	10.1 to 20.0	15	5.1 to 10.0	7	24/48 V DC	-	Included	0 to 100	70	Not Included	72	600	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	Suction fitting right direction	Individual actuator
871.99 €	1	18 Days	400	10.1 to 20.0	15	-	-	24/48 V DC	-	Not Included	0 to 100	70	Not Included	72	600	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	Suction fitting right direction	Individual actuator
846.76 €	1	18 Days	300	20.1 to 50.0	-	-	-	24/48 V DC	-	Not Included	101 to 200	125	Not Included	72	300	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	Suction fitting right direction	Individual actuator
1,007.32 €	1	18 Days	300	20.1 to 50.0	-	10.1 to 20.0	14	24/48 V DC	-	Included	101 to 200	125	Not Included	72	300	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	Suction fitting right direction	Individual actuator
706.00 €	1	18 Days	150	10.1 to 20.0	15	-	-	24/48 V DC	-	Not Included	0 to 100	70	Not Included	72	600	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	Single axis shaft	-	Individual actuator
866.69 €	1	18 Days	150	10.1 to 20.0	15	-	-	24/48 V DC	-	Included	0 to 100	70	Not Included	72	600	Straight	Pulse Train Input Type	Width 74 × Height 50	AZ Series	With electromagnetic brake	-	Individual actuator

Basic information

Main Body, Peripheral Components	Main Body	Type	Sliders	Drive Method	Rolled Ball Screw
Guide	Included	Position Detection	Absolute	I/O Module	Not Included
Noise Filters	Not Included	Usage Environment	Standard

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The part number is completed.

Basic Attributes

Stroke(mm)
50

100

150

200

250

300

350

400

450

500

550

600

650

700

750

800

850
Clear
Max. Transportable Mass Range (Horizontal)(kg)
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
Clear
Max. Transportable Mass (Horizontal)(kg)
7.5

15
Clear
Max. Transportable Mass Range (Vertical)(kg)
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
Clear
Max. Transportable Mass (Vertical)(kg)
3.5

7

12.5

14
Clear
Table Width W1(mm)
54
Clear
Electromagnetic Break
- Not Included
- Included
Clear
Max. Thrust Force Range(N)
- 0 to 100
- 101 to 200
- 301 to 500
Clear
Max. Thrust Force(N)
43

70

86

125

200

360

400
Clear
Cable
Standard 1 m

Standard 3 m

Not Included

Standard 2 m
Clear
Table Length L1(mm)
72

108
Clear
Maximum Velocity(mm/sec)
180

200

220

230

260

270

300

350

400

420

460

470

550

600

640

650

800
Clear
Motor Mounting Direction
- Left reversed motor
- Right reversed motor
- Straight
Clear
Driver Type
- Positioning function built-in type
- Pulse Train Input Type
Clear
Slider Size(mm)
- Width 54 × Height 50
- Width 74 × Height 50
- Width 74 × Height 66.5
Clear
On-Board Motor
- AR Series
- AZ Series
Clear
Motor Part Shape
- Single axis shaft
- With electromagnetic brake
Clear
Suction Fitting Direction
- Suction fitting left direction
- Suction fitting right direction
Clear
Product Type
- Actuator + driver set product
- Individual actuator
Clear
Type
- EZS3
- EZS4
- EZS6
- EZSM3
- EZSM4
- EZSM6
Clear
Input Power Supply
Single Phase 100-115 VAC

Single Phase 200-230 VAC

3-phase 200-230 VAC

Single Phase 200-240 VAC

24/48 V DC
Clear