Single Axis Robots(Max. Transportable Mass Range (Horizontal):20.1 to 50.0)

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Brand
Product Series
CAD
Starting from
Min. Shipping Days
Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric actuator rod type motorless specification LEY series

      Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

        Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

        • Promotional pricing ends 30/11/2024

        Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

          Electric actuator guided rod type LEYG series AC servo motor LECS□

            Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

              Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                  Electric actuator slider type belt drive motorless specification LEFB series

                    Single Axis Robots RSH5 / Linear

                      Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                        Single Axis Robots RSD2 / Rod Type

                          Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                            Electric actuator rod type with guide motorless specification LEYG series

                              Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                Electric Cylinder, EAC Series

                                  Single Axis Robots RSF4 / Linear / Narrow Type

                                    Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                      Electric actuator rod type LEY series AC servo motor LECS□

                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                          Single Axis Robot RSH1

                                            Rod Type with Support Guide

                                              Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                Electric actuator rod type LEY series AC servo motor LECY□

                                                  Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                    Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                      Electric Slider, EAS Series

                                                        Single Axis Robot RSH3

                                                          Single Axis Robots RSD3 / Rod Type

                                                            Rod Type with Support Guide

                                                              Single Axis Robots RSH4 / Linear

                                                                Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                  Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                      Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□

                                                                          Compact Electric Cylinder, DRS2 Series

                                                                            Single Axis Robot RSH2

                                                                              Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                Electric Slider, EZS Series

                                                                                Brand

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                MISUMI

                                                                                SMC

                                                                                MISUMI

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                ORIENTAL MOTOR

                                                                                MISUMI

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                MISUMI

                                                                                MISUMI

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                ORIENTAL MOTOR

                                                                                MISUMI

                                                                                MISUMI

                                                                                MISUMI

                                                                                MISUMI

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                SMC

                                                                                ORIENTAL MOTOR

                                                                                MISUMI

                                                                                SMC

                                                                                ORIENTAL MOTOR

                                                                                Product Series

                                                                                Electric actuator rod type motorless specification LEY series

                                                                                Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                Electric actuator slider type belt drive motorless specification LEFB series

                                                                                Single Axis Robots RSH5 / Linear

                                                                                Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                                                                Single Axis Robots RSD2 / Rod Type

                                                                                Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                Electric actuator rod type with guide motorless specification LEYG series

                                                                                Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                Electric Cylinder, EAC Series

                                                                                Single Axis Robots RSF4 / Linear / Narrow Type

                                                                                Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                Electric actuator rod type LEY series AC servo motor LECS□

                                                                                Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                Single Axis Robot RSH1

                                                                                Rod Type with Support Guide

                                                                                Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                Electric actuator rod type LEY series AC servo motor LECY□

                                                                                Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                Electric Slider, EAS Series

                                                                                Single Axis Robot RSH3

                                                                                Single Axis Robots RSD3 / Rod Type

                                                                                Rod Type with Support Guide

                                                                                Single Axis Robots RSH4 / Linear

                                                                                Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□

                                                                                Compact Electric Cylinder, DRS2 Series

                                                                                Single Axis Robot RSH2

                                                                                Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                Electric Slider, EZS Series

                                                                                CAD
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                                                                                Starting from

                                                                                475.09 €

                                                                                *Unit price with basic configuration

                                                                                950.76 €

                                                                                *Unit price with basic configuration

                                                                                1,453.37 €

                                                                                *Unit price with basic configuration

                                                                                1,151.63 €

                                                                                Special price

                                                                                *Unit price with basic configuration

                                                                                Promotional pricing ends 30/11/2024

                                                                                1,227.11 €

                                                                                *Unit price with basic configuration

                                                                                2,442.79 €

                                                                                *Unit price with basic configuration

                                                                                1,638.66 €

                                                                                *Unit price with basic configuration

                                                                                1,175.34 €

                                                                                *Unit price with basic configuration

                                                                                1,782.64 €

                                                                                *Unit price with basic configuration

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                                                                                1,878.61 €

                                                                                *Unit price with basic configuration

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                                                                                1,128.06 €

                                                                                *Unit price with basic configuration

                                                                                766.57 €

                                                                                *Unit price with basic configuration

                                                                                2,379.89 €

                                                                                *Unit price with basic configuration

                                                                                532.55 €

                                                                                *Unit price with basic configuration

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                                                                                1,932.06 €

                                                                                *Unit price with basic configuration

                                                                                1,000.57 €

                                                                                *Unit price with basic configuration

                                                                                1,636.08 €

                                                                                *Unit price with basic configuration

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                                                                                -

                                                                                3,130.23 €

                                                                                *Unit price with basic configuration

                                                                                1,173.60 €

                                                                                *Unit price with basic configuration

                                                                                1,591.73 €

                                                                                *Unit price with basic configuration

                                                                                1,570.63 €

                                                                                *Unit price with basic configuration

                                                                                679.95 €

                                                                                *Unit price with basic configuration

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                                                                                2,062.60 €

                                                                                *Unit price with basic configuration

                                                                                2,562.24 €

                                                                                *Unit price with basic configuration

                                                                                2,733.39 €

                                                                                *Unit price with basic configuration

                                                                                1,512.97 €

                                                                                *Unit price with basic configuration

                                                                                2,538.34 €

                                                                                *Unit price with basic configuration

                                                                                864.43 €

                                                                                *Unit price with basic configuration

                                                                                -

                                                                                2,740.10 €

                                                                                *Unit price with basic configuration

                                                                                681.97 €

                                                                                *Unit price with basic configuration

                                                                                Min. Shipping Days 9 Days 7 Days 4 Days 7 Days 26 Days 26 Days 26 Days 7 Days 26 Days 19 Days 26 Days 14 Days 26 Days 7 Days 26 Days 18 Days 19 Days 26 Days 26 Days 26 Days 19 Days 14 Days 26 Days 26 Days 26 Days 26 Days 18 Days 19 Days 14 Days 14 Days 19 Days 26 Days 26 Days 26 Days 26 Days 26 Days 18 Days 19 Days 26 Days 18 Days
                                                                                Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body
                                                                                TypeRodsRodsSlidersSlidersRodsSlidersSlidersRodsSlidersSlidersRodsRodsRodsRodsSlidersSlidersSlidersSlidersRodsSlidersSlidersRodsSlidersRodsRodsRodsSlidersSlidersRodsRodsSlidersSlidersSlidersSlidersSlidersSlidersRodsSlidersSlidersSliders
                                                                                Stroke(mm)30 ~ 80030 ~ 5001,000 ~ 9501,000 ~ 95030 ~ 3001,000 ~ 30001,000 ~ 95030 ~ 3001,000 ~ 3000150 ~ 1050100 ~ 80050 ~ 30030 ~ 40030 ~ 3001,000 ~ 300050 ~ 300150 ~ 10501,000 ~ 90030 ~ 5001,000 ~ 900150 ~ 80050 ~ 3001,000 ~ 300030 ~ 50030 ~ 50050 ~ 30050 ~ 850150 ~ 105050 ~ 30050 ~ 300150 ~ 10501,000 ~ 9001,000 ~ 9001,000 ~ 300050 ~ 8001,000 ~ 60050150 ~ 10501,000 ~ 90050 ~ 850
                                                                                Max. Transportable Mass Range (Horizontal)(kg)20.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.020.1 to 50.0
                                                                                Max. Transportable Mass (Horizontal)(kg)30 ~ 5023 ~ 5025 ~ 5030 ~ 5030 ~ 503030 ~ 5023 ~ 5025304025 ~ 4530 ~ 5030 ~ 5025-3030 ~ 4530 ~ 5040 ~ 5040502530 ~ 5030 ~ 5050 ~ 60-305025 ~ 454030 ~ 5030 ~ 453025 ~ 5030 ~ 45-40 ~ 5030 ~ 45-
                                                                                Max. Transportable Mass Range (Vertical)(kg)5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-2.1 to 5.010.1 to 20.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-10.1 to 20.02.1 to 5.02.1 to 5.0 / 5.1 to 10.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.05.1 to 10.05.1 to 10.0-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 20.1 to 50.010.1 to 20.0-5.1 to 10.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0-5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.020.1 to 50.05.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.010.1 to 20.0
                                                                                Max. Transportable Mass (Vertical)(kg)9 ~ 304 ~ 302 ~ 205 ~ 207 ~ 29-5 ~ 203.5 ~ 29-4195 ~ 259 ~ 307 ~ 29-1445 ~ 109 ~ 3010 ~ 2088.5-9 ~ 307 ~ 2915 ~ 1714-104 ~ 24105 ~ 205 ~ 10-7.5 ~ 205 ~ 10508 ~ 165 ~ 1012.5 ~ 14
                                                                                Drive MethodRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw
                                                                                GuideProvidedNot ProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedNot ProvidedProvidedProvidedNot Provided / ProvidedProvidedProvidedNot ProvidedProvided-ProvidedProvidedNot ProvidedNot ProvidedProvidedProvided-Not ProvidedProvidedProvidedProvidedProvidedProvidedProvidedProvidedNot Provided-ProvidedProvided
                                                                                Lead(mm)3 ~ 202.5 ~ 166 ~ 308 ~ 303 ~ 20428 ~ 302.5 ~ 1654 equivalent20202 ~ 123 ~ 203 ~ 2054 equivalent-2016 ~ 303 ~ 208 ~ 2061254 equivalent3 ~ 203 ~ 166 ~ 10-20122 ~ 12108 ~ 3016 ~ 30426 ~ 1616 ~ 2045 ~ 1016 ~ 30-
                                                                                Input Power Supply-24 V DC24 V DC----24 V DC-Single-Phase, 200 to 230 V AC-24 V DC---24/48 V DC ~ Single-Phase, 200 to 240 V ACSingle-Phase, 200 to 230 V AC---Single-Phase, 200 to 230 V AC24 V DC--24 V DC-24/48 V DC ~ Single-Phase, 200 to 240 V ACSingle-Phase, 200 to 230 V AC24 V DC24 V DCSingle-Phase, 200 to 230 V AC---24 V DC-24/48 V DCSingle-Phase, 200 to 230 V AC-24/48 V DC ~ Single-Phase, 200 to 230 V AC
                                                                                Position Detection-IncrementalIncrementalIncrementalIncremental / AbsoluteIncremental / AbsoluteIncremental / AbsoluteIncremental-Incremental / AbsoluteIncremental / AbsoluteIncrementalIncremental / Absolute-Incremental / AbsoluteAbsoluteIncremental / Absolute-Incremental / AbsoluteIncremental / AbsoluteIncremental / AbsoluteIncrementalAbsoluteAbsoluteIncrementalAbsoluteAbsoluteIncremental / AbsoluteIncrementalIncrementalIncremental / AbsoluteAbsoluteIncremental / AbsoluteAbsoluteIncrementalIncremental / AbsoluteAbsoluteIncremental / AbsoluteAbsoluteAbsolute
                                                                                I/O Module-NPN / PNP / DeviceNet / Ethernet / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINET----NPN / PNP / Ethernet / EtherCAT / PROFINET-NPN / PNP / CC-Link / DeviceNet-NPN / PNP / CC-Link / DeviceNet---Not ProvidedNPN / PNP / CC-Link / DeviceNet---NPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet--PNP / Ethernet-Not ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet---PNP / Ethernet / PROFINET-Not ProvidedNPN / PNP / CC-Link / DeviceNet-Not Provided
                                                                                Table Width W1(mm)--50 ~ 7460 ~ 74-12960 ~ 74-74135----74-94105 ~ 129-60 ~ 7480-74---36 ~ 8780--11060 ~ 74105 ~ 12912950 ~ 60105 ~ 129-80105 ~ 129-
                                                                                BrakeNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                Max. Thrust Force Range(N)101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500201 to 300 / 301 to 500201 to 300 / 301 to 500101 to 200 / 201 to 300 / 301 to 500201 to 300201 to 300 / 301 to 5000 to 100 / 101 to 200 / 201 to 300 / 301 to 500201 to 300301 to 500501 to 1000101 to 200 / 201 to 300 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500101 to 200 / 201 to 300 / 301 to 500201 to 300101 to 200301 to 500201 to 300 / 301 to 500101 to 200 / 201 to 300 / 301 to 500301 to 500201 to 300201 to 300201 to 300101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500101 to 200 / 301 to 500101 to 2000 to 100201 to 300101 to 200 / 201 to 300 / 501 to 1000301 to 500201 to 300 / 301 to 500201 to 300 / 301 to 500201 to 3000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000201 to 300 / 301 to 500301 to 500101 to 200 / 301 to 500201 to 300 / 301 to 500101 to 200
                                                                                Max. Thrust Force(N)157 ~ 52174 ~ 452245 ~ 490294 ~ 490157 ~ 485294294 ~ 49074 ~ 452245339521150 ~ 600157 ~ 485157 ~ 485245125 ~ 200339294 ~ 441157 ~ 485392 ~ 490283250245157 ~ 521122 ~ 452255 ~ 308125 ~ 20084250150 ~ 600339294 ~ 490294 ~ 441294245 ~ 490294 ~ 441500169 ~ 339294 ~ 441125 ~ 200
                                                                                Noise FiltersNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not Provided-Not ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot Provided / Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / Provided---Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot Provided
                                                                                Table Length L1(mm)--102 ~ 170122 ~ 170-172122 ~ 170-17090----170-90160 ~ 172-122 ~ 17078-170---65 ~ 80154--86122 ~ 170160 ~ 172172102 ~ 122160 ~ 172-78160 ~ 17272 ~ 108
                                                                                Usage EnvironmentDust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardDust ResistantStandardDust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardDust ResistantStandard / Dust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandard
                                                                                Positioning Repeatability(µm)±10 ~ ±20±20±15 ~ ±20±10 ~ ±20±10 ~ ±20±40±10 ~ ±20±20±60±10±20±20±20±10 ~ ±20±60-±10±10 ~ ±20±10 ~ ±20±20±20±20±60±10 ~ ±20±20±20-±10±20±20±10±10 ~ ±20±10 ~ ±20±40±15 ~ ±20±20-±10±10 ~ ±20-
                                                                                Maximum Velocity(mm/sec)1,000 ~ 1000125 ~ 5001,140 ~ 9301,000 ~ 9401,000 ~ 45030001,000 ~ 940125 ~ 500200018001,000 ~ 80080 ~ 5001,000 ~ 4501,000 ~ 4502000300 ~ 60018001,200 ~ 18001,000 ~ 10001,000 ~ 94036030020001,000 ~ 800100 ~ 4001,000 ~ 450270 ~ 800120030080 ~ 50018001,000 ~ 9401,200 ~ 18003000250 ~ 5001,200 ~ 60050300 ~ 6001,200 ~ 1800300 ~ 800

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